Adsorption properties of porous silicon

Authors

DOI:

https://doi.org/10.26636/jtit.2001.1.41

Keywords:

porous silicon, cantilever beam, gas sensor

Abstract

Porous silicon shows some interesting features for micromechanical applications. Some applications make use of its high surface-to-volume ratio. A capacitive gas or humidity sensor using the adsorption of gases on the porous surface can be easily fabricated. However an opportunity for more sensitive device is given by micromechanical structure. In this paper we report on the piezoresistive cantilever beam structure with porous silicon adsorbing spot as a gas sensor.

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References

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Submitted

2023-04-06

Published

2001-03-30

Issue

No. 1 (2001)

Section

ARTICLES FROM THIS ISSUE

License

Copyright (c) 2001 Journal of Telecommunications and Information Technology

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.

How to Cite

[1]
K. Domański, P. Grabiec, T. Gotszalk, R. B. Beck, T. Dębski, and I. W. Rangelow, “Adsorption properties of porous silicon”, JTIT, vol. 3, no. 1, pp. 53–56, Mar. 2001, doi: 10.26636/jtit.2001.1.41.

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