Efficient procedure for capacitance matrix calculation of multilayer VLSI interconnects using quasi-static analysis and Fourier series

Authors

DOI:

https://doi.org/10.26636/jtit.2002.2.124

Keywords:

lossy IC interconnect, Fourier projection method, line capacitance

Abstract

In this paper, we present a new approach for capacitance matrix calculation of lossy multilayer VLSI interconnects based on quasi-static analysis and Fourier projection technique. The formulation is independent from the position of the interconnect conductors and number of layers in the structure, and is especially adequate to model 2D and 3D layered structures with planar boundaries. Thanks to the quasi-static algorithms considered for the capacitance analysis and the expansions in terms of convergent Fourier series the tool is reliable and very efficient; results can be obtained with relatively little programming effort. The validity of the technique is verified by comparing its results with on-surface MEI method, moment method for total charges in the structure, and CAD-oriented equivalent-circuit methodology, respectively.

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References

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Submitted

2023-04-07

Published

2002-06-30

Issue

No. 2 (2002)

Section

ARTICLES FROM THIS ISSUE

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Copyright (c) 2002 Journal of Telecommunications and Information Technology

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.

How to Cite

[1]
B. Nauwelaers, H. Ymeri, and K. Maex, “Efficient procedure for capacitance matrix calculation of multilayer VLSI interconnects using quasi-static analysis and Fourier series”, JTIT, vol. 8, no. 2, pp. 40–44, Jun. 2002, doi: 10.26636/jtit.2002.2.124.