High-temperature instability processes in SOI structures and MOSFETs
DOI:
https://doi.org/10.26636/jtit.2001.1.47Keywords:
SOI, MOSFET, high-temperature instability, ZMR, SIMOXAbstract
The paper reviews the problems related to BOX high-temperature instability in SOI structures and MOSFETs. The methods of bias-temperature research applied to SOI structures and SOI MOSFETs are analysed and the results of combined electrical studies of ZMR, and SIMOX SOI struc- tures are presented. The studies are focused mainly on elec- trical discharging processes in the BOX at high temperature and its link with new instability phenomena such as high- temperature kink effects in SOI MOSFETs.
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