FIREK, Piotr; WERBOWY, Aleksander; SZMIDT, Jan; KWIETNIEWSKI, Norber. Influence of the deposition process parameters on electronic properties of BN films obtained by means of RF PACVD. Journal of Telecommunications and Information Technology, [S. l.], v. 29, n. 3, p. 33–36, 2007. DOI: 10.26636/jtit.2007.3.825. Disponível em: https://www.jtit.pl/jtit/article/view/825. Acesso em: 3 oct. 2025.